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Helium ion chromatograph for analysis of tetrachlorosilane
The instrument is equipped with a highly sensitive helium ionization detector and adopts the central cutting technology of Huaai Company. The injectio
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Analysis of Helium Ion Chromatography with TetrachlorosilaneSuitable for detecting trace impurities in gases used in the electronic industry, with a small detection concentration of up to 5ppb. The instrument is equipped with a highly sensitive helium ionization detector and adopts the central cutting technology of Huaai Company. The injection valves are all equipped with blow off protection gas paths; The whole machine adopts a multi column box design and is equipped with an automatic calibration system for injection pressure to ensure the injection volume of samples with different bottom gases. The product has successively won the A-level project for the transformation of high-tech achievements in Shanghai.
| Silicon (SiHCl)3）Content (volume fraction)/l0-6 ≤ | 400 | 25 | |
| Dichlorosilane (SiH)2Cl2）Content (volume fraction)/l0-6 ≤ | 400 | 25 | |
| Methyl dichlorosilane (SiCl)2CH4）Content (volume fraction)/l0-6 ≤ | 200 | 50 | |
| Content of metal elements and other elements | (Boron+Aluminum) (B+Al) content/(µ g/kg) ≤ | —— | 0.1 |
| (Phosphorus+Arsenic) (P+As) content/(µ g/kg) ≤ | —— | 0.3 | |
| Gallium (Ga) content/(µ g/kg) ≤ | —— | 0.5 | |
| Antimony (Sb) content/(µ g/kg) ≤ | —— | 0.5 | |
| Indium (In) content/(µ g/kg) ≤ | —— | 0.5 | |
| Calcium (Ca) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Chromium (Cr) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Iron (Fe) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Potassium (K) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Sodium (Na) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Nickel (Ni) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Molybdenum (Mo) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Manganese (Mn) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Copper (Cu) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Cadmium (Cd) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Cobalt (Co) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Zinc (Zn) content/(µ g/kg) ≤ | 1 | 0.5 | |
| Vanadium (V) content/(µ g/kg) ≤ | 1 | 0.5 | |
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